2 results
SiC-Si Grooved Surface Bonding
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 681 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, I5.6
- Print publication:
- 2001
-
- Article
- Export citation
Direct Bonding of Silicon Wafers with Simultaneous Dopant Diffusion
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 681 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, I5.7
- Print publication:
- 2001
-
- Article
- Export citation