3 results
Planar oxidation of strained silicon substrates
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 3 / March 2001
- Published online by Cambridge University Press:
- 26 November 2012, pp. 728-733
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- March 2001
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Intrinsic stress effects on the growth of planar SiO2 films
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 12 / December 1999
- Published online by Cambridge University Press:
- 31 January 2011, pp. 4508-4513
- Print publication:
- December 1999
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Stress Effects in the Oxidation of Planar SiO2 Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 594 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 175
- Print publication:
- 1999
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