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Monte Carlo Simulations Of Elastic Scattering With Applications To Dc And High Power Pulsed Magnetron Sputtering For Ti3SIC2
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- Journal:
- Communications in Computational Physics / Volume 11 / Issue 5 / May 2012
- Published online by Cambridge University Press:
- 20 August 2015, pp. 1618-1642
- Print publication:
- May 2012
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- Article
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