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Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 413
- Print publication:
- 1999
-
- Article
- Export citation
Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 562 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 249
- Print publication:
- 1999
-
- Article
- Export citation