3 results
Development of Double-cantilever Infrared Focal Plane Arrays: Fabrication and Post-process Curvature Modification
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- Journal:
- MRS Online Proceedings Library Archive / Volume 952 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0952-F10-03
- Print publication:
- 2006
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Application of polyimide sacrificial layers for the manufacturing of uncooled double-cantilever microbolometers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 890 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, 0890-Y08-15
- Print publication:
- 2005
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Stress Hysteresis and Thermal-Mechanical Behavior of PECVD Silicon Nitride and Ebeam Aluminum Films for Microbolometer Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 854 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, U10.11
- Print publication:
- 2004
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