3 results
Reduced-Pressure UV Photo-Oxidation of Organic Contaminants on Si Surfaces
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- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 273
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- 1995
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Cu Deposition from HF Solutions and Effects on Regrowth of Si Native Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 467
- Print publication:
- 1993
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Kinetics of UV/O2 Cleaning and Surface Passivation: Experiments and Modeling
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 207
- Print publication:
- 1992
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