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Infrared Spectroscopy of Sub-Surface Defects induced by Remote Hydrogen Plasma exposure of Silicon(100)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 513 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 375
- Print publication:
- 1998
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Surface Cleaning Prior to Formation of Si/SiO2 Interfaces by Remote Plasma-Enhanced Chemical Vapor Deposition (RPECVD)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 75
- Print publication:
- 1992
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- Article
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