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Evaluation of Tribological and Mechanical Properties of Nitride Thin Films Prepared by Cathodic ARC Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 750 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, Y5.19
- Print publication:
- 2002
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- Article
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Measurement of Mechanical Properties of Single and Multilayered Nitride thin Films Prepared by Cathodic Arc Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 697 / January 2001
- Published online by Cambridge University Press:
- 17 March 2011, P5.4
- Print publication:
- January 2001
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- Article
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