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Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques
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- Journal:
- MRS Bulletin / Volume 27 / Issue 4 / April 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 301-308
- Print publication:
- April 2002
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- Article
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Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 672 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, O8.39
- Print publication:
- 2001
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- Article
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