3 results
Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s04-04
- Print publication:
- 2011
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Nano-scale Observation of Si Trench Sidewall Surface Morphology by AFM Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1025 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1025-B07-11
- Print publication:
- 2007
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Time Evolution of Nano-scale Morphology of Silicon Microstructure Surfaces in the Early Phase of Hydrogen Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 958 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0958-L10-13
- Print publication:
- 2006
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