A micro-impact tester has been designed and built by using a piezoelectric impact hammer as an impactor driver. During the course of an impact process, force interactions between the impactor and target surfaces were monitored continuously by a miniaturized piezoelectric loadcell embedded in the flying head assembly. After having fully characterized an impact system, the trajectory of the impactor can be calculated by using the corresponding pre-recorded impact force interaction in the simulation program. The contact and returning velocities, kinetic energy loss of the impactor and the impact penetration curve are the key information obtained from the simulation. Furthermore, the impact morphology can reveal failure mechanisms of materials by providing details such as indent shapes, coating fragments, chipping, crack type and size, and other such information which are useful in assessing the fracture toughness of testing materials. The micro-impact testing was carried out in the contact velocity ranging from 0.3 to 2.0 m/sec. Three types of materials such as metal, glass and amorphous carbon were used in studying their distinct mechanical behavior under high rate indentations. The correlations between the impact conditions, energy losses, impact morphologies and material responses are illustrated and discussed.