2 results
Atom-Probe Tomography of Semiconductor Materials and Device Structures
-
- Journal:
- MRS Bulletin / Volume 34 / Issue 10 / October 2009
- Published online by Cambridge University Press:
- 02 March 2012, pp. 738-743
- Print publication:
- October 2009
-
- Article
- Export citation
Extendibility Study of a PVD Cu Seed Process with Ar+ Rf-Plasma Enhanced Coverage for 45nm Interconnects
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N03-04
- Print publication:
- 2008
-
- Article
- Export citation