2 results
Systematic Characterization of DRIE-Based Fabrication Process of Silicon Microneedles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1052 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1052-DD07-07
- Print publication:
- 2007
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- Article
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Mechanical Characterization of Thin-Film Composites using the Load-Deflection Response of Multilayer Membranes - Elastic and Fracture Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 977 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 977-FF08-08
- Print publication:
- 2006
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- Article
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