This paper reports on the refinement of a mechanical model for the
load-deflection of multilayer membranes under uniform differential pressure
and on its application to the experimental extraction of material
parameters. Going beyond previous results, the analytical model takes into
account the mechanics of multilayers and elastic supports covering all cases
between rigidly clamped to simply supported structures and enables the
straightforward assessment of stress profiles within the deformed
structures. A comprehensive set of long membranes made of various
multilayers of silicon nitride and oxide films are fabricated and
characterized. The out-of-plane deflection profile under pressure load is
monitored by means of a laser profilometer. The pressure is stepped up until
fracture occurs. From the stress profiles in the membrane at fracture, the
brittle material strength is analyzed using Weibull statistics. The bulge
setup has been fully automated for the measurement of 80 membranes per
wafer. This realizes, for the first time, the high throughput-acquisition of
mechanical thin film data with convincing statistical control.