1 results
Diffraction from Periodic Arrays of Oxide-Filled Trenches in Silicon: Investigation of Local Strains
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 913 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0913-D05-02
- Print publication:
- 2006
-
- Article
- Export citation