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The Effect of High Temperature Annealing on the Grain Characteristics of a Thin Chemical Vapor Deposition Silicon Carbide Layer
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
- Published online by Cambridge University Press:
- 09 October 2013, pp. 1948-1949
- Print publication:
- August 2013
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- Article
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