9 results
Characterization of High-k Dielectrics by Combined Spectroscopic Ellipsometry (SE) and X-Ray Reflectometry (XRR)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E3.29
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- 2003
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Very-Low Surface Roughness in Laser Crystallized Polycrystalline Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 471 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 197
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- 1997
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Structural characterization of different insulating films by spectroscopic ellipsometry and grazing x‐ray reflectance
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 369
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- 1996
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Crystallization of Si(1-yCy Films by Excimer Laser Annealing: Characterization of the Microstructure of the Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 452 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 959
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- 1996
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In-situ Real Time Spectroscopic Ellipsometry Applied to the Surface Monitoring of Semiconductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 452 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 1025
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- 1996
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Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 405 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 399
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- 1995
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Single shot excimer laser annealing of amorphous silicon: effect of hydrogen on the properties of the poly silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 397 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 417
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- 1995
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Combine spectroscopic ellipsometry and grazing x-ray reflectance for fine characterization of complex epitaxial structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 406 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 515
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- 1995
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Bistable Defects Induced in GaAs by H2 Plasma Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 425
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- 1989
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