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Potential of the Ultra-thin Layer Fabricated by Wet-process as a Pore-seal for Porous Low-k Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-F06-03
- Print publication:
- 2010
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- Article
- Export citation