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Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research
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- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 203
- Print publication:
- 1996
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- Article
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Observation of Film Growth Phenomena Using Micromachined Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 441 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 69
- Print publication:
- 1996
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- Article
- Export citation