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In situ XPS investigation about the growth of the first atomic layer of Ta(N) films deposited by thermal TBTDET ALD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1146 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1146-NN09-08
- Print publication:
- 2008
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- Article
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