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Thermal Stabilization and Crystallization of Nanometric Particles of Si-C-N Produced by RF-Plasma Enhanced Chemical-Vapor-Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A24.5
- Print publication:
- 2000
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- Article
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