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Thickness-Dependant Electrical Characteristics of Nitrogen-Doped Polycrystalline 3C-SiC Thin Films Deposited by LPCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1222 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1222-DD02-33
- Print publication:
- 2009
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- Article
- Export citation