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Stress Control in Sputtered Silicon Nitride Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 472 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 239
- Print publication:
- 1997
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- Article
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Stress Characterization of Sputtered PZT Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 505 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 403
- Print publication:
- 1997
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- Article
- Export citation