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Compatibility Challenges for High-ĸ Materials Integration into CMOS Technology
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- Journal:
- MRS Bulletin / Volume 27 / Issue 3 / March 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 226-229
- Print publication:
- March 2002
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- Article
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Stress-Recovery Transients in Ultra Thin Oxides on Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 473 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 197
- Print publication:
- 1997
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- Article
- Export citation