4 results
Grain Formation in Polycrystalline Silicon Films Deposition on SiO2 at Very Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 377 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 149
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- 1995
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Deposition of Hydrogenated Si Films by Hydrogenation of the SiO2 Surface and Hydrogen Dilution with PE-CVD and ECR-CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 345 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 117
- Print publication:
- 1994
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Novel Sulfur Treatment of SiO2 Surface for Poly Silicon Growth on SiO2/Si Structure
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- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 125
- Print publication:
- 1993
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Surface Cleaning and Passivation for the Growth of Si/Oxide/Si Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 137
- Print publication:
- 1992
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