2 results
Influence of Surface Organic Contamination on the Incubation Time in Low-Pressure Chemical Vapor Deposition of Silicon Nitride on Silicon Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 379
- Print publication:
- 1997
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- Article
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Acceleration of Organic Contaminant Adsorption Onto Silicon Surfaces in the Presence of Residual Fluorine
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 387
- Print publication:
- 1997
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- Article
- Export citation