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Layer Transfer and Simultaneous Activation of Phosphorus Atoms in Silicon Films by Near-Infrared Semiconductor Diode Laser Irradiation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1426 / 2012
- Published online by Cambridge University Press:
- 10 May 2012, pp. 275-280
- Print publication:
- 2012
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- Article
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