We report on typical examples of thin carbon films prepared employing energy
beam techniques such as ion beam deposition, ion beam assisted deposition
and Laser illumination. In an annealing study of ion beam deposited carbon
films, small dots with sub-micron size are isolated through the selective
oxidation of sp3-bonded amorphous carbon films, and they were
confirmed to be diamond nano-particles by micro-Raman spectrometry.
C60 deposition assisted with Ne ion beam results in two kinds
of films: 1) The quality of C60 films is improved by the assist
of 500eV Ne ion bombardment. 2) The increase of Ne ion Energy results in the
decomposition of C60 and the films obtained at 700°C contain
possible nano-diamond crystallites at the center of the intense beam spot.
The Laser illumination decomposes C60 molecules in general, but
the fine-tuning of Laser energy density makes it possible to prepare an
array of high luminescent spots.