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An Autonomous and Intelligent System Using Mobile-Agent Software to Model the Calculation Processes of Film Deposition Simulators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1024 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1024-A06-05
- Print publication:
- 2007
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- Article
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Automatic Reaction Modeling in Chemical Vapor Depositions Using Multiple Process Simulators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 804 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, JJ9.15
- Print publication:
- 2003
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- Article
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