2 results
Characterization of Large Particles in Fumed Silica Based CMP Slurry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-E04-08
- Print publication:
- 2010
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- Article
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Topography Reduction During Barrier CMP Improved Due to Tantalum Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 732 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, I4.5
- Print publication:
- 2002
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- Article
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