1 results
Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1791 / 2015
- Published online by Cambridge University Press:
- 25 May 2015, pp. 15-20
- Print publication:
- 2015
-
- Article
- Export citation