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A Self-Aligned Silicide Process Utilizing Ion Implants for Reduced Silicon Consumption and Control of the Silicide Formation Temperature
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B1.7
- Print publication:
- 2002
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- Article
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A Self-Aligned Silicide Process for Thin Silicon-on-Insulator MOSFETs and Bulk MOSFETs with Shallow Junctions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 686 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, A3.3
- Print publication:
- 2001
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- Article
- Export citation