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Mechanistic Understanding of the Stress-Induced Failure of Si3N4 Metal-Insulator-Metal Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 695 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, L6.15.1
- Print publication:
- 2001
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Low temperature selective Si epitaxy by reduced pressure chemical vapor deposition introducing periodic deposition and etching cycles with SiH4, H2 and HCl
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A8.2
- Print publication:
- 2000
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Effects of Halogen-Containing Gas Plasma and Rapid Thermal Anneal Treatment on the Reactive Ion Etched Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 324 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 481
- Print publication:
- 1993
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