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Compensation effect of boron and nitrogen codoping on the hardness and electrical resistivity of diamond-like carbon films prepared by magnetron sputtering deposition
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- Journal:
- Journal of Materials Research / Volume 27 / Issue 23 / 14 December 2012
- Published online by Cambridge University Press:
- 31 October 2012, pp. 3027-3032
- Print publication:
- 14 December 2012
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- Article
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