6 results
Characterization of High-k Dielectrics by Combined Spectroscopic Ellipsometry (SE) and X-Ray Reflectometry (XRR)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E3.29
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- 2003
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Structural characterization of different insulating films by spectroscopic ellipsometry and grazing x‐ray reflectance
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 369
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- 1996
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Single shot excimer laser annealing of amorphous silicon: effect of hydrogen on the properties of the poly silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 397 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 417
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- 1995
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A Mew Variable Angle Ft—ir Ellipsometer
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- Journal:
- MRS Online Proceedings Library Archive / Volume 171 / 1989
- Published online by Cambridge University Press:
- 22 February 2011, 349
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- 1989
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Spectroscopic Ellipsometry as a Non-Destructive Technique for Characterization of Atomic-Scale Interfaces
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- Journal:
- MRS Online Proceedings Library Archive / Volume 159 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 459
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- 1989
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Multispectral Spectroscopic Ellipsometry-A New Tool for In Situ Surface Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 101 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 403
- Print publication:
- 1987
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