2 results
Polycrystalline Silicon Layers for Shallow Junction Formation: Phosphorus Diffusion from In Situ Spike-Doped Chemical Vapor Deposited Amorphous Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 343 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 691
- Print publication:
- 1994
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- Article
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Topographical Effects Regarding Trench Structures Covered with Rtcvd Sige Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 507
- Print publication:
- 1993
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- Article
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