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Local Cross-sectional Profiling of Multilayer Thin Films with an Atomic Force Microscope for Layer Thickness Determination
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- Journal:
- Journal of Materials Research / Volume 12 / Issue 8 / August 1997
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1935-1938
- Print publication:
- August 1997
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- Article
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