1 results
Photodefinable Metal Oxide Dielectrics II: Direct Fabrication of Patterned High-k Dielectrics for Low Cost RF Capacitive MEMS Switches
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 833 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, G6.3
- Print publication:
- 2004
-
- Article
- Export citation