1 results
Submicron Roughness Determination at the Si-SiO2 Interface and Correlations to Prccessing Steps and Electronic Properties
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 105 / 1987
- Published online by Cambridge University Press:
- 22 February 2011, 247
- Print publication:
- 1987
-
- Article
- Export citation