3 results
Wafer Bonding for Backside Illuminated CMOS Image Sensors Fabrication
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-F08-06
- Print publication:
- 2010
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- Article
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Metal Wafer Bonding for MEMS Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1139 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG03-33
- Print publication:
- 2008
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- Article
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Aligned Low Temperature Wafer Bonding for MEMS Manufacturing: Challenges and Promises
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1052 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1052-DD03-15
- Print publication:
- 2007
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- Article
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