5 results
Stress and Hardness of CrNx films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 703 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, V3.24
- Print publication:
- 2001
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Selective Aluminum CVD on Si(100) From DMAH
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- Journal:
- MRS Online Proceedings Library Archive / Volume 580 / 1999
- Published online by Cambridge University Press:
- 15 February 2011, 141
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- 1999
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Growth Stress in CVD-WGex Films Deposited by Reduction of WF6 by GeH4
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- Journal:
- MRS Online Proceedings Library Archive / Volume 308 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 27
- Print publication:
- 1993
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The Influence of Temperature Gradients on Partial Pressures in a Cvd Reactor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 483
- Print publication:
- 1993
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Evolution of Stress During Formation of Titanium Disilicide by Rta and Tube Furnace Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 265
- Print publication:
- 1990
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