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Surface Chemical Modification for Via-Hole Filling Using Tri-Isobutylaluminum Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 101 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 183
- Print publication:
- 1987
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- Article
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Surface Photochemically Activated Chemical Vapor Deposition of Patterned Aluminum Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 75 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 117
- Print publication:
- 1986
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- Article
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