3 results
Formation of Shallow Boron P+ Junctions Using Sb Amorphization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 128 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 635
- Print publication:
- 1988
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Enhanced Diffusion During Rapid Thermal Annealing Of Indium And Boron In Double Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 33
- Print publication:
- 1987
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Effects of Indium Preamorphization on Boron Implanted Silicon Annealed by RTA
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- Journal:
- MRS Online Proceedings Library Archive / Volume 74 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 717
- Print publication:
- 1986
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