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Plasma deposition of a–Si, Ge: H, F thin films from SiF4–GeH4–H2 mixturesa)
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- Journal:
- Journal of Materials Research / Volume 4 / Issue 2 / April 1989
- Published online by Cambridge University Press:
- 31 January 2011, pp. 366-372
- Print publication:
- April 1989
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- Article
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