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Polarization Resolved Grazing Angle Scatterometry for In Situ Monitoring of Roughness for Silicon and Compound Solar Cells, Light Emitting Devices and other Structured Surfaces
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- Journal:
- MRS Advances / Volume 2 / Issue 53 / 2017
- Published online by Cambridge University Press:
- 27 June 2017, pp. 3129-3133
- Print publication:
- 2017
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- Article
- Export citation