3 results
Laser-Induced Local Decomposition of Adsorbed Tungsten Fluorine Molecules for Metal Deposition on Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 158 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 155
- Print publication:
- 1989
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Computer Simulation of Laser Induced Temperatures for the Laser Direct Writing technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 101 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 131
- Print publication:
- 1987
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- Article
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Localized Laser-Assisted Deposition of Silicon,Silicon Nitride and Silicon Dioxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 101 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 125
- Print publication:
- 1987
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- Article
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