1 results
Evaluation of Design and Performance of a Cryogenic Mems Micropump Realized with Si-Based Diaphragm Using Combination of Zygo/Wyko Interferometer and Raman Spectroscopy
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 782 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A5.52
- Print publication:
- 2003
-
- Article
- Export citation