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Microscale friction investigation of polysilicon surface using scanning force microscopy
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- Journal:
- The European Physical Journal - Applied Physics / Volume 3 / Issue 1 / July 1998
- Published online by Cambridge University Press:
- 15 July 1998, pp. 29-33
- Print publication:
- July 1998
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Surface Morphology of P-Doped LPCVD Silicon Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 339
- Print publication:
- 1995
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- Article
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