2 results
Hot Wall Isothermal RTP for Gate Oxide Growth and Nitridation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 611 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, C7.7.1
- Print publication:
- 2000
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- Article
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Rapid Verticai Processor for Fast-Ramp Small-Batch Diffusion and Oxidation Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 207
- Print publication:
- 1997
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- Article
- Export citation