3 results
Materials Issues In X-Ray Lithography
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- Journal:
- MRS Online Proceedings Library Archive / Volume 306 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 3
- Print publication:
- 1993
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Reactive-Ion-Etching of 100nm Linewidth Tungsten Features Using SF6:H2 and a Cr-Liftoff Mask
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- Journal:
- MRS Online Proceedings Library Archive / Volume 324 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 487
- Print publication:
- 1993
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A Soluble Polydiacetylene, P4BCMU, As a Negative Electron Beam Resist
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- Journal:
- MRS Online Proceedings Library Archive / Volume 76 / 1986
- Published online by Cambridge University Press:
- 25 February 2011, 353
- Print publication:
- 1986
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