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Gas flow effects on the structure and composition of SiNx/Si/SiNx films prepared by radio-frequency magnetron sputtering
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 1 / January 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 308-313
- Print publication:
- January 2001
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- Article
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